A Practical OEM Checklist for Specifying a Wafer Heater

https://thermal-innovation-hub.oakmontscope.com/posts/what-makes-a-silicone-heater-suitable-for-curved-surfaces

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result