How Ramp Rate and Thermal Cycling Affect a Semiconductor Heater Application

https://precision-surface-heat.publishlane.com/posts/how-to-choose-a-mica-heating-plate-for-high-temperature-applications

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery