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Sensor Placement Strategies for Better Mica Heating Plate Temperature Feedback

https://escatter11.fullerton.edu/nfs/show_user.php?userid=9978120

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry

Submitted on 2026-09-22 15:02:34

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